Time Varying Plasmas and Afterglows for Surface Treatments

Time varying discharges and afterglows have been studied in Ar and gases for several types of discharge structures (DC, RF, DBD, magnetron) at different gas pressures from a few mTorr to the atmospheric gas pressure. It has been discussed the effects of reactions between metastable atoms ) and from molecules ( in long time range and short time range afterglows in the excitations of Ar high radiative levels, ) level and bands. Strong emissions of and -atoms ( when was added to in short time range , low Ar pressure pulsed DC magnetron plasmas which were associated to hard coatings.