Determination of N and O-atoms, of N2(A) and N2(X,v>13) Metastable Molecules and N2+ ion Densities in the Ar-N2 Afterglows Jets of Microwave Discharges

Afterglow jets of Ar-N2 flowing microwave discharges are characterized by optical emission spectroscopy. The and atoms, the and metastable molecules and ion densities are determined after calibration by titration for and -atoms and measurements of and band intensities. For an Ar-xN2 gas mixture with increasing from 2 to at 4 Torr , 100 Watt and an afterglow time of at the 5 liter reactor inlet, it is found densities in the ranges of for - atoms, one order of magnitude lower for ) and for 0 - atoms (coming from air impurity), of for and of for .

Afterglow jets of Ar-N2 flowing microwave discharges are characterized by optical emission spectroscopy. The and atoms, the and metastable molecules and ion densities are determined after calibration by titration for and -atoms and measurements of and band intensities. For an Ar-xN2 gas mixture with increasing from 2 to at 4 Torr , 100 Watt and an afterglow time of at the 5 liter reactor inlet, it is found densities in the ranges of for - atoms, one order of magnitude lower for ) and for 0 - atoms (coming from air impurity), of for and of for .